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Fabrication of superhydrophobic wide-band “Black Silicon” by deep reactive ion etching
2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (2011) -
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doi: 10.1109/nems.2011.6017331
Tian-Le Gao, Xiao-Sheng Zhang, Guang-Yi Sun, Hai-Xia Zhang
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