A GHz Silicon-Based Width Extensional Mode MEMS Resonator with over 10,000
Sensors (2023) - 0 Comments
pubmed: 37112146  doi: 10.3390/s23083808  issn: 1424-8220 

Wenli Liu , Yujie Lu , Zeji Chen , Qianqian Jia , Junyuan Zhao , Bo Niu , Wei Wang , Yalu Hao , Yinfang Zhu , Jinling Yang , Fuhua Yang

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