Fabrication of High-Sensitivity Polycrystalline Silicon Nanowire Field-Effect Transistor pH Sensor Using Conventional Complementary Metal–Oxide–Semiconductor Technology

Japanese Journal of Applied Physics (2011) - Comment
doi: 10.1143/jjap.50.04dl05 issn: 0021-4922 issn: 1347-4065

Hou-Yu Chen, Chia-Yi Lin, Min-Cheng Chen, Chien-Chao Huang, Chao-Hsin Chien