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Design-Aware Mask Inspection
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems (2012) -
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doi: 10.1109/tcad.2011.2181909 issn: 0278-0070 issn: 1937-4151
Abde Ali Kagalwalla, Puneet Gupta, Christopher J. Progler, Steve McDonald
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Institute of Electrical and Electronics Engineers (IEEE)
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