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Nan Wang, Shinya Yoshida, Masafumi Kumano, Yusuke Kawai, Masayoshi Esashi
Search publications for: doi:10.1109/NEMS.2012.6196767 1 result
Fabrication of high-aspect-ratio PZT structure by nanocomposite sol-gel method for laterally-driven piezoelectric MEMS switch
Nan Wang, Shinya Yoshida, Masafumi Kumano, Yusuke Kawai, Masayoshi Esashi